Chemical Supply and Process Systems for Wet Processing
Reliable supply, dosing and disposal of process chemicals.
Demand-based chemical supply
Container sizes and supply concept matched to consumption.
Controlled chemical transfer
Process chemical supply and discharge designed for the application.
Integratable system technology
Pumps, valves and controls matched to the equipment.
Dosing and mixing
Supply and prepare process chemicals as required.
Monitoring and protection
Level and leak monitoring depending on configuration.
Chemical Supply and Media Management
Chemical supply and process systems connect chemical storage, distribution and monitoring. Depending on the application, dosing, mixing, transfer and waste handling can be integrated.
Explore the qCXS chemical supply system
For Wafers, Substrates and Components
One system – many possibilities.
Chemical supply tailored to the chemicals and substrates used in connected processes.
Explore materials & substrates
Related Products & Systems
Complementary solutions for your wet process.
Typical Applications
From research and development to industrial manufacturing.
Chemical supply
Supply of defined process chemicals.
Chemical waste handling
Collection and discharge of spent chemicals.
Slurry mixing
Mixing and transfer of process slurries.
Process dosing
Application-specific chemical delivery and dosing.
Chemical distribution
Distribution to multiple process tools.
Frequently asked questions
What information is needed for system design?
Chemicals, container sizes, consumption, points of use and disposal requirements determine system design.
Can chemical supply serve existing equipment?
Routing, connections and transfer points are planned around existing equipment and building utilities.
Let’s discuss your chemical supply system
We configure supply, distribution and waste collection around your chemicals and equipment.