Wafer loading
Slot geometry and pitch depend on wafer format, thickness and permitted contact areas.
WAFER & SUBSTRATE HANDLING
Wafer and Substrate Carriers for Reliable Processing
Precision carriers for transport, wet chemical processing and drying.
Standard and custom solutions
Carrier concepts matched to quantities and requirements.
Process-specific drainage
Geometry tailored to liquid drainage and drying.
Optimized for handling
Support geometry and interfaces matched to the handling system.
Materials for wet processing
Materials selected for chemicals and temperature.
Secure substrate support
Defined support during transport and processing.
EQUIPMENT OVERVIEW
Carriers for Wafers and Substrates
Wafer and substrate carriers support secure positioning during transport and wet processing. Geometry, contact points, drainage and material selection are tailored to the application.
Explore qCAR wafer carriers For Wafers, Substrates and Components
One system – many possibilities.
Custom carriers for silicon, compound semiconductors, glass and other substrates.
Explore materials & substratesRelated Products & Systems
Complementary solutions for your wet process.
Typical Applications
From research and development to industrial manufacturing.
Wafer handling
Secure support of individual wafers or batches.
Substrate transport
Transport and positioning of substrates.
Wet cleaning
Carriers for wet chemical process steps.
Drying
Holders for drying processes.
Automated manufacturing
Interfaces to automated handling systems.
Carriers for different applications
Substrate transport
Carriers keep substrates in a defined position during transfers between stations.
Wet cleaning and rinsing
Materials and open geometry are selected for the process chemicals and liquid exchange.
Drying
Contact points and clearances affect drainage and access for the drying medium.
Automated transfer
Gripping points and interfaces are matched to robots, stations and transfer positions.
Frequently asked questions
What information is needed to specify a carrier?
Key inputs include substrate size, thickness and contact areas, process chemicals and interfaces to tanks and handling systems.
Can the carrier be handled automatically?
Gripping points and transfer positions can be designed for the intended stations and handling system.
PERSONAL CONSULTATION
Let’s discuss your wafer or substrate carrier
We match the holder design, material and interfaces to your process.