Automated Wet Benches for Industrial Wet Processing
Automated cleaning, etching and process control for demanding throughput and repeatability requirements.
Automatic wet bench in operation
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Efficient processing
Automation matched to throughput and production needs.
Controlled chemical handling
Chemical supply and rinsing tailored to the process.
Automated handling
Substrate transport and workflows integrated into one system.
Repeatable wet processes
Process steps and parameters configurable through recipes.
Monitored processing
Monitoring and protection functions based on the system concept.
Custom Automated Wet Processing
Automated wet benches integrate multiple process steps into one system. Tanks, transport automation, recipe management and interfaces are adapted to the substrate and manufacturing requirements.
Automatic wet benches compared
Which wet bench fits your application? qSPRINT offers flexible process sequences in a compact footprint, qRUN supports different batch sizes for solar cell manufacturing, and qMARATHON is designed for large-format substrates.
Scroll sideways to compare the models.
| Feature | qSPRINT | qRUN | qMARATHON |
|---|---|---|---|
| Main application | Semiconductor and other applications requiring a range of wet chemical processes | Wafer cleaning and texturing for solar cell manufacturing | Wet chemical processing of large-format IC substrates, printed circuit boards and glass |
| Format and batch size | Wafer format and batch size depend on equipment configuration | 50, 100, 200, 400 or 600 full-square wafers per batch, depending on configuration | Substrates up to 600 × 600 mm |
| Typical use | Process development and production | Pilot to mass production | Continuous industrial operation |
| Equipment design | Compact design with one or two rows of process tanks | Modular system with dynamic carrier buffering and software-based batch scheduling | Modular material flow with optional belt loading and maintenance access via walkways |
Equipment is configured to suit the substrate format, process sequence and target throughput.
Send an inquiryFor Wafers, Substrates and Components
One system – many possibilities.
Automated processing for different wafer and substrate formats.
Explore materials & substrates
Related Products & Systems
Complementary solutions for your wet process.
Typical Applications
From research and development to industrial manufacturing.
Semiconductor manufacturing
Wet processing in wafer manufacturing.
Photovoltaics
Cleaning and texturing solar wafers.
IC substrates
Processing large-format substrates.
Surface treatment
Cleaning and etching technical surfaces.
Volume production
Automated workflows in manufacturing.
International from the start – the first exateq wet benches went to Taiwan in 2015
Two automatic wet benches for solar wafer texturing. The report covers the role of KOH and texturing additives and what exateq learned during commissioning on site.
Read the project report →Frequently asked questions
What information is needed for initial design?
Substrate format, process sequence, batch size and target throughput guide platform selection and system layout.
How is the wet bench integrated into production?
We match loading and unloading, utility connections and control interfaces to material flow and existing infrastructure.
Let’s discuss your automatic wet bench
We plan process sequences, handling and throughput for your production line.