qRUN
The qRUN is an automated wet bench for performing cleaning and texturing processes in large scale (GW) production of solar cells . Designs for various wafer and batch sizes are available and ensure top process homogeneity and reproducibility. With its proven technology, the qRUN has been established worldwide and sets standards in efficiency and quality. The processes run under strictly controlled conditions to achieve consistently clean and uniform surfaces for maximum efficiency.
The system software controls and monitors all process steps, optimizes system operation via an intelligent scheduling system and thus ensures maximum throughput with simultaneously high process reliability and traceability.
Available in different throughput sizes
- 50 full square wafers per batch
- 100 full square wafers per batch
- 200 full square wafers per batch
- 400 full square wafers per batch
- 600 full square wafers per batch
Convincing Software
- Batch scheduling for maximum throughput
- Individual recipe management
- Configurable trend evaluation
- User management
- Alarm management
- MES ready
Unique features
- Dynamic carrier buffer in load and unloadstation
- Transfer unit spray function
Easy FAB integration
- Included control cabinets
- Included O3 generator
- Included lift pumps
- Modular concept with low footprint
