qMARATHON
When it comes to large-format substrates, printed circuit boards and glass materials with process sizes up to 600 × 600 mm², our qMARATHON platform is the optimal solution. The automatic wet bench was developed for applications that place the highest demands on process cleanliness, reproducibility and surface quality, and is designed for continuous industrial operation. The system can be equipped with a belt-based loading system that enables gentle and uniform transport of the substrates through the process zones. An optimized flow guidance ensures homogeneous treatment results over the entire surface.
For daily operation, maintenance friendliness was consistently considered: Catwalks and easily accessible components enable safe and efficient execution of service and cleaning work. Thus, the qMARATHON offers the highest system availability with minimal maintenance effort.
Convincing Software
- Batch scheduling for maximum throughput
- Individual recipe management
- Configurable trend evaluation
- User management
- Alarm management
- MES ready
Unique features
- Transfer system with active drip protection
- 3D movement for substrates
- substrate shocking
- Filter fan units for maximum purity
Easy FAB integration
- Modular design
- Catwalks for accessibility process space
- Catwalks for accessibility gray space
- No steel construction required
Flexible flow of goods
- Circular systems to reduce system length
- Integrable carrier conveyor belts
- Integrable carrier lifts
- Stripping for carriers