Special Systems
Not every process can be mapped with our various standard solutions – this is where our special systems come into play. They are individually tailored to specific process requirements, space conditions or material properties and enable tailor-made solutions for complex tasks. Whether special wet chemistry processes, multi-stage process chains, integrated handling solutions or combinations of dry and wet processes – each system is developed and implemented precisely according to customer specifications.
Our engineers accompany the entire development process – from the concept phase through design and manufacturing to commissioning and documentation. Process reliability, system availability and ease of operation are the focus. The result is robust, efficient systems that are precisely tailored to the respective application and can be seamlessly integrated into existing production environments.
Core competence areas
- Wet chemical systems
- Automation for wet chemical systems
- Wafer handling
- Supply, disposal and handling of media
Product development stages
- Test setup
- Prototype
- Pilot system
- Series system
Suitable software and electronics
- Button operation
- HMI Panel
- HMI Monitor with complete visualization of all MSR functions
- Individual software functions
Maximum safety with documentation
- Operating manual
- Risk assessment
- ATEX documentation
- CE declaration
