qRUN
Automatic wet bench for scalable throughputs from pilot production to mass production
The qRUN is an automated wet bench for performing cleaning and texturing processes in large scale (GW) production of solar cells . Designs for various wafer and batch sizes are available and ensure top process homogeneity and reproducibility. With its proven technology, the qRUN has been established worldwide and sets standards in efficiency and quality. The processes run under strictly controlled conditions to achieve consistently clean and uniform surfaces for maximum efficiency.
The system software controls and monitors all process steps, optimizes system operation via an intelligent scheduling system and thus ensures maximum throughput with simultaneously high process reliability and traceability.
Available in different throughput sizes
- 50 full square wafers per batch
- 100 full square wafers per batch
- 200 full square wafers per batch
- 400 full square wafers per batch
- 600 full square wafers per batch
Convincing Software
- Batch scheduling for maximum throughput
- Individual recipe management
- Configurable trend evaluation
- User management
- Alarm management
- MES ready
Unique features
- Dynamic carrier buffer in load and unloadstation
- Transfer unit spray function
Easy FAB integration
- Included control cabinets
- Included O3 generator
- Included lift pumps
- Modular concept with low footprint
International from the start – the first exateq wet benches went to Taiwan in 2015
Two automatic wet benches for solar wafer texturing. The report covers the role of KOH and texturing additives and what exateq learned during commissioning on site.
Read the project report